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ANSYS Course Information
Multiphysics Simulation for MEMS - 3 days

The course focuses on coupled physics simulation methods and techniques for common MEMS devices.

Basic technical concepts covered include:


- thermal-electric actuators
- comb drive resonators
- micromirrors
- switches and piezoelectric actuators.

Advanced technical concepts covered include:

- electrostatics
- capacitance extraction
- piezoelectrics
- pre-stress effects
- initial stress effects
- damping characterisation via CFD simulation
- thermal-electric coupled simulation
- coupled electrostatic-structural dynamic simulation including time-harmonic and time-transients
- sub-structuring
- reduced order modelling using coupled transducer elements
- pull-in and hystersis simulation and more.

Course Topics Include:

- Geometric Non-linearity's and Initial Stress Contact Analysis for MEMS
- Applications Pre-Stressed Modal Analysis Beam Cross-Section Modelling
- Introduction to Electrostatic Analysis Capacitance
- Hybrid Trefftz-Finite Element Method for Open Domains
- Electrostatic-Structural Coupling Fundamentals Sequential Method for -Electrostatic-Structural Coupling
- Direct Matrix-Coupled Electrostatic-Structural Methods using the TRANS126 Transducer
- Pre-Stressed Modal and Pre-Stressed Harmonic Analysis using TRANS126
- Large-Signal Transient Analysis using TRANS126
- Reduced Order Macro Modelling for System Simulation of MEMS Devices -Introduction to Piezoelectric Analysis
- Introduction to Current Conduction Analysis Thermal-Electric Coupled-Field Analysis
- Thermal Stress Analysis
- Using CFD for Reduced Order Modelling Damping Characterisation
- Units System for MEMS Simulation

Each course chapter is followed by "hands-on" workshops and exercises.



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